But note, it’s still using the asml machines. Title is a bit misleading maybe.
I can’t think of a reading that would be misleading. It’s common knowledge (among the people who would care about such an article) that TSMC uses ASML machines, as ASML has a near monopoly on EUV litography machines.
‘Pricey new tool from ASML’ can only mean the high NA EUV machines as ASML really only makes one kind of pricey tool.
They are talking about the low NA EUV tool which is quite pricey in its own right at $200 million. They are working on hyper NA EUV next… At $724 million.
I’m just happy I work on trailing edge steppers and scanners. Those are complex enough that reading about the EUV machines makes me sick to think about having to perform any maintainence on them.
I’ve worked around an ancient (32nm) lithography machine, it may as well be alien technology as far as maintenance is concerned.
It’s very much a ‘the light is on, something broke. call the machine priests’ kind of situation.
They are using the old low NA EUV machines. Still expensive and still pretty cutting edge, just not the newest.
Yes I know. It’s just not the latest and greatest. But that became clear after reading the full article. Initially I thought, seeing the title alone, that there was a competitor delivering a similar machine.
I don’t think Canon or Nikon have anything close to leading edge these days and every other scanner manufacturer has gone under.


