The nightmare toaster has about the clown fireman chasing him was legitimately scary. The way the clown says "Run." is still fresh in my mind decades later.
We're getting close! EUV is currently ~13nm, and soft xrays start at ~10nm (but go all the way down to ~0.01nm for hard xrays.)
Sadly there a lots of challenges in transitioning to smaller wavelengths. For example, to get the EUV light in the existing process, we're already resorting to, essentially, exploding tiny droplets of liquid tin using lasers.
The nightmare toaster has about the clown fireman chasing him was legitimately scary. The way the clown says "Run." is still fresh in my mind decades later.